Parameter

FR-tools

Ellipsometry

Stylus Profilometer

X-ray reflectivity (XRR)

Minimum thickness

1nm

<1nm

20nm

<1nm

Maximum thickness

500um

10um

Few mm

200-300 nm (depending on the contrast)

RI measurement

Yes

Yes

No

No

Thickness Mapping

Yes

Yes

No

Time consuming

Step Profiling

No

No

Yes

No

Capability for Process Monitoring

High

Moderate

N/A

N/A

Probe goes over the sample

Yes

No

No

No

Overall Measurement Speed

High

Moderate

Slow

Very Slow

Data Acquisition Rate

10msec per measurement

>2sec-fast mode,

>10 sec. – Standard mode

5-30sec per measurement

Average: 30 min per measurement-

Portability

Yes

No

No

No

Easy of Use

Yes

Moderate

Yes

No

Destructive

No

No

Yes

No

Special Training

No

Yes

No

Yes

Moving Parts

No

Yes

Yes

Yes

Repeatability/Stability

0.1nm

0.1nm

0.4nm

Yes

Thermal Measurements

Yes

Yes

No

Ν/Α

Sample Preparation

No

No

Yes

No

Multiple Layers Measurement

Yes

Yes

No

Yes

Customization

Yes

No

No

Yes

Reflectance, Transmittance, Absorbance, Specular/Diffuse Reflectance, Haze, Color measurements

Yes

Yes (under certain conditions)

No

No

Dimensions

Handheld/Table-top

Small (>300mm W x 110mm D x 40mm H)*

Table-top

Medium (500 mm W x 300 mm D x 300 mm H)

Table-top

Medium (450 mm W x 550 mm D x 350 mm H)

Large (1400mm W x 850mm D x 1800 H)

Weight

0.65Kg *

>17 kg

>30 kg

>350Kg

Price of Replacement parts

Low

High

High

Extremely High

Price (Basic system)

Low (<$10K)

High(>$30K)

High(>$30K)

Very High

Particular Characteristics

Film thickness

Refractive Index

Surface roughness

Uniformity

 

SWE:

Film thickness

Refractive Index

SE:

Film thickness

Refractive Index

Surface roughness

Uniformity

Birefringence

Crystallinity

Anisotropy

Film thickness

Step height

Roughness

Waviness

2D stress

Surface curvature

 

In addition to thickness it provide information about: Roughness, density and thickness of each individual sublayer, interdiffusion between sublayers

 

* FR-pOrtable without the stage

 

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