IntroductionFR-pOrtable is a unique USB-powered solution for accurate & precise non-destructive characterization of transparent and semi-transparent single films or stack of films. FR-pOrtable can perform reflectance & transmittance measurements in the 370-1020nm spectral range. The compact design of FR-pOrtable, guarantees highly accurate and repeatabley of measurements. FR-pOrtable, can be either mounted on the supplied stage or can be easily transformed to a handheld thickness measurement tool to be placed over the area under characterization. This way, FR-pOrtable is the only optical characterization tool for in-field applications. Reflectance, Transmittance, Absorption and Color parameters can be measured |
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Specifications |
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| Thickness Measurement Range | 12nm-90um | Light Source LifeTime | 20.000hours |
| Refractive Index Calculation | YES (>100nm thick) | Wavelength Resolution | 0.8nm |
| Thickness measurement Accuracy | 0.2% or 1nm | Layers to be Characterized | 5 (simultaneous) |
| Thickness measurement Precision | 0.05nm or 1‰ (0.01nm) | Measurement Time (Min) | 5msec |
| Thickness measurement stability | 0.06nm | Spectrometer | 3648pixels, 16bit |
| Sample size | 1mm to 300mm and up | Power | USB-Supplied |
| Spectral Range | 370-1020nm | Dimensions | 300mm x 110mm x 40mm |
| Working Distance | 3-20mm | Weight | 600gr |
| Spot Size | 1.0-4.0mm |
FR-pOrtable Brochure
Typical Measurements with FR-pOrtable
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| 10nm Si3N4 layer on Si wafer | 84nm TiO2 layer on microscope glass | 110nm PMMA layer on Si wafer |
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| 2462.9nm TEOS on Si wafer (RI calc) | 48.7μm SU-8 resist film on Si wafer | 162.4nm Si3N4/990.1nm SiO2 on Si wafer |
Accessories
At-the-Field adaptor: For measurements at the Point-of-Need.
Transmittance module: For the measurement of transmittance & absorbance of coatings, coating thickness etc.
Manual X-Y stage: For the characterization of coatings at multiple positions (manual movement)