ThetaMetrisis ( is a privately held company that was established in December 2008 in Athens, Greece by Ph.D. engineers in the field of optics and sensors technology. ThetaMetrisis is the first spin-off company of the Institute of Microelectronics, NCSR 'Demokritos'.

Initally the company was focused on the design and manufacturing of optical metrology tools for the characterization of thin and thick films, the FR-Series. FR-tools are based on White Light Reflectance Spectroscopy (WLRS) methodology, that was developed by ThetaMetrisis founders, for accurate and simultaneous measurement of the thickness and the refractive index of stacked thin and thick films.
The first FR-tool (FR-μProbe) for film thickness and fluorescence measurements was installed in June 2009.


From September 2011, ThetaMetrisis participate in selected research projects collaborating with key public research institutions and other high-tech companies. Through those research projects, ThetaMetrisis aims at the further advancement of its products and the development of new ones in order to serve emerging markets
The first PM-QE tool for the electro-optical characterization of solar cells was installed in November 2011.


In April 2012 the company changed its legal status to ThetaMetrisis S.A.


In April 2013 the USB-powered FR-pOrtable tool was introduced to the market.

FR pOrtable and Computer

In June 2014 the FR-Scanner tool for automated mapping of thickness and optical properties at wafer level was introduced to the market.

FR Scanner F

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