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_Optical Methodologies

For the characterization of transparent and semi-transparent thin or thick films, the optical methodologies are the most popular ones, offering fast, non destructive and highly accurate measurements. The mostly used ones are

• Single Wavelength Interferometry (SWI),

• Single Wavelength Ellipsometry (SWE),

• White Light Reflectance Spectroscopy (WLRS) and

• Spectrometric Ellipsometry (SE).

The Film Characterization tools designed and developed by Thetametrisis are based on White Light Reflectance Spectroscopy (WLRS). WLRS analyses the reflected interference spectrum from a sample, and offers real time measurements of film thickness, refractive index and absorption coefficients of thin and thick transparent or semitransparent films and stack of films at very low cost compared to Ellipsometric techniques without compromise in accuracy and application range. The particular design of Thetametrisis tools, offer very high level of integration of the measurement set-up, high flexibility, state of the art software. Furthermore it is possible to extend their use in various applications such as in liquids and in controlled (e.g. temperature and/or gas ambient) environments.

The algorithms implemented in FR-Monitor, the software supplied with every FR-tool, support not only single film measurements over a reflective substrate, but also multilayer films stacks over a reflective substrate or even suspended single or multilayer films stacks. Furthermore, depending on the FR-tool configuration, typical absorbance/transmittance fluorescence and reflectance measurements are supported.

A detail presentation of the principle of operation and the experimental set-up of Absorbance/Transmittance, Fluorescence, Irradiation, and Reflectance optical measurements, along with Single Wavelength Interferometry and White Light Reflectance Spectroscopy methodologies are presented below:

Optical Measurements,
basic principles of Absorbance, Transmittance, Fluorescence
and Reflectance measurements.
more
Singe Wavelength Interferometry (SWI) measurements,
a low cost methodology for in situ monitoring of film thickness changes.
more
White light Reflectance Spectroscopy,
a highly accurate technique for ex-situ and in-situ characterizationfilm measurements it can be used for both in situ & in vitro measurements.
more
Technologies Comparison,
advantages and disadvantages of Optical Film Characterization methodologies.
more
Applications,
presentation of typical applications of the above described techniques.
more
 
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