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_Techologies Comparison
The advantages and disadvantages of Single Wavelength Interferometer (SWI) and White Light Reflectance Spectroscopy (WLRS) methodologies over spectroscopic ellipsometry (SE) are summarized in the following table:
 
SWI
WLRS
SE
Set-up Integration
High
High
Low
Cost
Low
Moderate
High
Ease of data interprentation
High
High
Low
Flexibility
High
High
Low
Minimum film thickness
40 nm (with some difficulty)
10 nm (easily)
5 nm (easily)

Polymer Characterization (Tg, CTE…)
No
Yes
Yes
Special Characteristics
Integration to microscope for micro-probing. Ability for surface scanning
Accurately measured thickness and optical indices
 
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