_FR-μProbe |
| |
Introduction
FR-μProbe is a miniaturized turn-key solution for optical measurements at various modes such as absorbance, transmittance, reflectance and fluorescence at the Point of Interest (PoI) through optical microscope. The tool incorporates two optical components: a spectrometer equipped with variable-blazed grating specifically designed to provide full spectral analysis in the 200-1100* nm range and an adaptor for the eye lens of the optical microscope. The light source used for the measurements is the one available in the optical microscope. The adaptor for the eye lens is tailored to the dimensions of the microscope to be mounted on, and include a lens for increased light collection. The size area from which the signal is collected is defined by the magnification of the objective lens used. Typically for a 40X objective lens, the monitored area is a circle with ~ 200μm diameter. The collection area could be further decreased by using objective lenses of higher magnification. |
|
|
Furthermore through processing of reflectance measurements the film thickness and optical constants (n & k) of the areas of thin and thick film stacks under investigation are calculated.
FR-μProbe case is designed and fabricated with Anodized Aluminum profile and offers an elegant and robust construction. |
|
|
| Fig.1. FR-μProbe installed on a microscope.... |
Fig. 2. Typical measurement of a thick SiO2 film with a X20 objective of a microscope, using the FR-Monitor software. |
|
The entire system is shipped ready for measurements. The only additional part needed is a PC with a free USB port. The system can be easily used by anyone with basic computer skills without any deep knowledge of optics. |
|
Software
FR-Monitor® is used for the tool control and processing of the spectral measurements and offers unique capabilities for a wide range of applications and versatility. It acquires in real time absorbance, transmittance, reflectance, or fluorescence spectra, and performs very fast computations thanks to the state of the art algorithms implemented in Visual C++.
In absorbance / transmittance configuration, all typical parameters such as A, T are calculated. Furthermore, other non-conventional parameters such as signal integration that are very useful in other measurements are calculated.
In the case of reflectance measurements, FR-Monitor the software includes the White Light Reflectance Spectroscopy (WLRS) algorithm (ThetaMetrisisTM) for accurate calculation of film thickness (<10nm up to 100μm) and optical constants (n & k) of free-standing and supported (over transparent or partially/fully reflective substrates) stack of (<10 layers) films.
|
Specifications** |
Applications |
| Thickness |
5nm – 150μm* |
Absorbance – Transmission – Fluorescence measurements |
| Wavelength range |
200-1100nm* |
Chemical & Biological Sensing |
| Accuracy |
0.5 % |
Photonic Structures Characterization |
| Precision |
0.02nm |
Materials (Metal, Dielectrics) Characterization |
| Light source |
Optical microscope's light source |
Semiconductor Fabrication |
| Spot size |
depends on selected objective |
Polymers Characterization |
| Computer requirements |
PC with Windows XP/Vista/7 and a USB port available |
Supported & Free-standing films characterization |
| Dimensions (WxLxH) |
120mm x 120mm x 100mm* |
Optical Coatings |
| Weight |
1,2Kgr* |
In-Situ Measurements |
|
* Depends on the configuration, please refer to FR-Basic page. |
** Specifications are subject to change without any notice. |
|
| |
| |
