_FR-Education |
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Description
FR-Education is a low-cost table-top optical instrument for typical optical meauserments (Absorbance/Transmittance, Reflectance, Fluorescence) and non destructive meauserments of Film thickness and optical properties (n & k) of thin and thick films. The measurements of film thickness and optical properties is based on White Light Reflectance Spectroscopy (WLRS). In WLRS, the interference signal, at the VIS/NIR spectrum, from the reflectance of the top and bottom surfaces of the film(s) is collected with the embedded spectrometer and then fitted with the multi-layer reflectance equation to derive the thickness and optical constants of film(s).
FR-Education tool is controlled through especially developed Windows™ software, (FR-Monitor) performing the sptral data acquisition for film thickness and optical constants calculations. A material database is included and can be easily expanded by the user. The entire system (hardware – software): light source, spectrometer, reflectance probe optical fiber, sample stage, and Windows™ software is shipped ready for measurements. The only additional part needed is a PC with a free USB port. The system can be easily used by anyone with basic computer skills without any deep knowledge of optics.
The FR-Education tool can handle layer stacks consisted of numerous layers and two quantities can be calculated simultaneously e.g. thicknesses of two films, thickness and n & k of one film. |
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FR-Education is a simplified version of FR-Basic with case Type A (please refer to FR-Basic section), with or without cover top. In this configuration the spectrometer has 650 pixels, and thus the film thickness range can be measured is limited. Furthermore FR-Education comes with a Reflection Probe, two (2) fibers, and a film/cuvette holder for Absorbance/Transmittance measurements.
A patterned and characterized 4” Si wafer with various stacks (SiO2, Si3N4/SiO2, poly-Si/Si3N4/SiO2) is provided as a reference, while optical absorbance standards can be provided on request.
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FR-Education is ideal for educational labs of Universities devoted to optical characterization of liquid / solid samples and for measurement of film thicknesses. |
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Specifications* |
Applications |
| Thickness |
100nm – 30μm |
Polymer Characterization |
| Wavelength range |
300-1000nm |
Photoresist Characterization |
| Detector |
650 pixels Si CCD array, 12Bit A/D resolution |
Chemical measurements |
| Accuracy |
1 % |
Biomedical |
| Spot size |
0.5mm |
Semiconductor |
| Light Source |
Regulated Tungsten - Halogen (360nm - 2000nm) |
non Metal Films |
| Sample size |
10 - 150mm, irregular shape |
Optical Coating |
| Computer requirements |
PC with Windows XP/Vista/7 and a USB port available |
Hardcoats |
| Power requirements |
110V/230V AC |
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| Dimensions (WxLxH) |
320mm x 360mm x 180mm** |
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| Weight |
9.2Kgr |
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* Specifications are subject to change without any notice. |
** Without the reflactance holder. |
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