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_Literature
 

Selected publications in international journals and conference proceedings about: resist dissolution, resist and polymer thermal analysis, polymer swelling under various chemical enviroments, using Single Wavelenght Interferometry and White Light Reflectance Interferometry.

For additional information or a copy of a paper, please send an e-mail to: info@thetametrisis.com
 
publications
presentations
 
Publications in International Journals

  1. I.Raptis, D.Velesiotis, M.Vasilopoulou, P.Argitis Microelectron. Eng. 53 489(2000) “Development mechanism study by dissolution monitoring of positive methacrylate resists”

  2. N.Glezos, P.Argitis, D.Velessiotis, I.Raptis, M.Hatzakis, P.Hudek, I.Kostic J. Vac. Sci. Technol B18 3431(2000) “Aqueous base development and acid diffusion length optimisation in negative epoxy resist for electron beam lithography”

  3. I.Raptis Microelectron. Eng. 57-58 525(2001) “Free volume effects in resist lithographic performance”

  4. D.F.Stamatialis, M.Sanopoulou, I.Raptis J. Appl. Polym. Sci. 83 2823(2002) “Swelling and dissolution behavior of poly(methyl methacrylate) films in methyl ethyl ketone/methyl alcohol mixtures studied by optical techniques”

  5. I.Raptis, C.D.Diakoumakos Microelectron. Eng. 61-62 829(2002) “Non destructive method for monitoring glass transitions in thin photoresist films”

  6. M.Chatzichristidi, I.Raptis, C.D.Diakoumakos, N.Glezos, P.Argitis, M.Sanopoulou Microelectron. Eng. 61-62 729(2002) “Strippable aqueous base developable negative photoresist for high aspect ratio micromachining”

  7. M.Chatzichristidi, I.Raptis, P.Argitis J. Everett J. Vac. Sci. Technol. B20 2968(2002) “Partially hydrogenated poly(vinyl phenol) based photoresist for near UV, high aspect ratio micromachining”

  8. C.D.Diakoumakos, I.Raptis Polymer 44 251(2003) “In-situ monitoring of thermal transitions in thin polymeric films via optical Interferometry”

  9. I.Raptis, D.Niakoula, V.Bellas, E.Tegou, E.Gogolides, P.Argitis, K.G.Papadokostaki, A.Ioannidis Microelectron. Eng. 67-68 283(2003) “Resist process issues related to the glass transition changes in thin conventional and chemically amplified resist films”

  10. A.Olzierski, I.Raptis Microelectron. Eng. 73–74 244(2004) “Development and molecular weight issues on the lithographic performance of poly(methylmethacrylate)”

  11. D.Niakoula, I.Raptis, D.Goustouridis, P.Argitis Jpn. J. Appl. Phys. 43 5247(2004) “Glass transition temperature monitoring in bilayer and patterned photoresist films“

  12. S.Chatzandroulis, D.Goustouridis, I.Raptis Microelectron. Eng. 78-79 118(2005) “Polymeric film characterization for use in bimorph chemical sensors”

  13. D.Goustouridis, K.Manoli, S.Chatzandroulis, M.Sanopoulou, I.Raptis Sens. Act. B 111-112, 549(2005) ”Characterization of Polymer Layers for Silicon Micromachined Bilayer Chemical

  14. J.Raczkowska, A.Bernasik, A.Budkowski, P.Cyganik, J.Rysz, I.Raptis, P.Czuba Surf. Sci. 600 1004(2006) “Pattern guided structure formation in polymer films of asymmetric blends”

  15. S.Marceau, J.-H.Tortai, J.Tillier, N.Vourdas, E.Gogolides, I.Raptis, K.Beltsios, K.van Werden Microelectron. Eng. 83 1073(2006) “Thickness-dependent glass transition temperature of thin resist films for high resolution lithography”

  16. K.Manoli, D.Goustouridis, S.Chatzandroulis, I.Raptis, E.S.Valamontes, M.Sanopoulou, Polymer 47 6117(2006) “Vapor sorption in thin supported polymer films studied by white light interferometry”

  17. N.Vourdas, G.Karadimos, D.Goustouridis, E.Gogolides, A.G.Boudouvis, J.-H.Tortai, K.Beltsios, I.Raptis J. Appl. Polym. Sci. 102 4764(2006) “Multi-wavelength interferometry and competing optical methods for the thermal probing of thin polymeric films”

  18. J.Jaczewska, A.Budkowski, A.Bernasik, I.Raptis, J.Raczkowska, D.Goustouridis, J.Rysz, M.Sanopoulou J. Appl. Polym. Sci. 105 67(2007) “Humidity effects in spin-coated films of polythiophene-polystyrene blends”

  19. I.Raptis, J.Kovač, M.Chatzichristidi, E.Sarantopoulou, Z.Kollia, S.Kobe, A.C.Cefalas J. Laser Micro/Nanoengineering 2 200(2007) “Enhancement of sensing properties of thin poly(methyl methacrylate) films by VUV surface modification”

  20. M.Kitsara, K.Beltsios, D.Goustouridis, S.Chatzandroulis, I.Raptis Eur. Polymer J. 43 4602(2007) “Sequential polymer lithography for chemical sensor arrays”

  21. J.Jaczewska, I.Raptis, A.Budkowski, D.Goustouridis, J.Raczkowska, M.Sanopoulou, E.Pamuła, A. Bernasik, J.Rysz Synth. Met. 157 726(2007) “Swelling of poly(3-alkylthiophene) films exposed to solvent vapours and humidity: Evaluation of solubility parameters”

  22. A.Kokkinis, E.S.Valamontes, D.Goustouridis, Th.Ganetsos, K.Beltsios, I.Raptis Microelectron. Eng. 85 93(2008) “Molecular weight and processing effects on the dissolution properties of thin poly(methyl methacrylate) films”

  23. D.Drygiannakis, G.P.Patsis, K.vanWerden, A.Boudouvis, I.Raptis Microelectron. Eng. 85 955(2008) “Processing effects on the dissolution properties of thin chemically amplified photoresist films”

  24. E.Sarantopoulou, Z.Kollia, A.C.Cefalas, K.Manoli, M.Sanopoulou, D.Goustouridis, S.Chatzandroulis, I.Raptis Appl. Surf. Sci. 254 1710(2008) “Surface nano/micro functionalization of PMMA thin films by 157 nm irradiation for sensing applications”
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Presentations in International Conferences

  1. I.Raptis, D. Niakoula, E. Tegou, P. Argitis, E. Gogolides C. Cefalas, E. Sarantopoulou Int. Extreme UV Lithography (EUVL) Symp. (Texas, USA, 10/2002) “Resist Process Issues at EUV Related to the Glass Transition Changes Accompanying Film Thickness Reduction”

  2. D.Niakoula, I.Raptis, V.Bellas, P.Argitis Proc. SPIE 5039 357(2003) ”Glass transition temperature studies in thin photoresist films”

  3. D.Goustouridis, S.Chatzandroulis, I.Raptis, E.S.Valamontes IEEE Sensors 2004 (Vienna, Austria, 10/2004) “Modification of polymer swelling by UV irradiation for use in chemical sensing”

  4. A.Kokkinis, E.S.Valamontes, I.Raptis J. Phys. Conf. Ser. 10 401(2005) “Dissolution properties of ultrathin photoresist films for the fabrication of nanostructures”

  5. S.Chatzandroulis, D.Goustouridis, I.Raptis J. Phys. Conf. Ser. 10 297(2005) “Characterization of polymer films for use in bimorph chemical sensors”

  6. A.Kokkinis, D.Goustouridis, E.S.Valamontes, I.Raptis 5th Int. Conf. Polymer Surface Modification (Toronto, Canada, 06/2005) “Material and processing effects on the dissolution properties of thin resist films for high resolution lithography”

  7. D.Goustouridis, M.Kitsara, S.Chatzandroulis, K.Beltsios, I.Raptis EuroSensors 2005 (Barcelona, Spain, 09/2005) “A simple process for the deposition of polymer arrays for use in chemical sensing”

  8. N.Vourdas, G.Karadimos, E.Gogolides, A.G.Boudouvis, I.Raptis 4th Int. Conf. Instrumental Methods of Analysis (Iraklion, Greece, 10/2005) ”Evaluation of optical methods for the glass transition temperature measurement of thin polymeric films”

  9. K.Manoli, D.Goustouridis, S.Chatzandroulis, I.Raptis, M.Sanopoulou 4th Int. Conf. Instrumental Methods of Analysis (Iraklion, Greece, 10/2005) “Sorption of vapors in thin polymer films studied by white light interferometry”

  10. D.Niakoula, D.Drygiannakis, I.Raptis, G.P.Patsis, P.Argitis, E.Gogolides, V.P.Vidali, D.R.Gautam, E.A.Couladouros, W.Yueh, J.Roberts,

  11. R.Meagley MicroProcess & Nanotech Conf. (Kanagawa, Japan, 10/2006) “Dissolution studies of polycarbocycle-based aqueous base developable molecular resists”

  12. E.Sarantopoulou, Z.Kollia, K.Manoli, M.Sanopoulou, D.Goustouridis, S.Chatzandroulis, I.Raptis Transducers 2007 (Lyon, France, 06/2007) “Modification of sensing properties of thin polymer films by VUV irradiation”

  13. J.Jaczewska, A.Budkowski, J.Raczkowska, I.Raptis, D.Goustouridis IXth Int. Conf. Front. Pol. Adv. Mater. 2007 (Cracow, Poland 07/2007) “Swelling of Poly(3-alkylthiophene) films exposed to solvent vapors and humidity: effects of head to tail regioregularity”

  14. J.Jaczewska, A.Budkowski, J.Raczkowska, I.Raptis, D.Goustouridis 46th Microsymp. Nanostruct. Polym. & Polym. Nanocomp.(Prague, Czech Republic, 07/2007) “Swelling of Poly(3-alkylthiophene) films exposed to solvent vapors and humidity: effects of head to tail regioregularity”

  15. K.Manoli, E.Karonis, D.Goustouridis, S.Chatzandroulis, I.Raptis, M.Sanopoulou Instrumental Methods of Analysis (IMA 2007) (Patras, Greece, 10/2007) “A chemocapacitive sensor array for the detection of volatile compounds and humidity”

  16. M.Zavali, P.S.Petrou, S.Kakabakos, I.Raptis, K.Misiakos Instrumental Methods of Analysis (IMA 2007) (Patras, Greece, 10/2007) “Real time monitoring of biomolecular interactions by a label-free reflectance spectroscopy sensor”

  17. M.Chatzichristidi, E.Valamontes, I.Raptis, J.A.vanKan, F.Watt Microprocess & Nanotechnology Conf. (MNC 07) (Kyoto, Japan, 11/2007) “Realization and simulation of high aspect ratio micro/nano structures by proton beam writing”
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