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© 2008 thetametrisis

Mission Statement

At ThetaMetrisis, tools are tailored to customer’s needs without any compromise in accuracy, quality and after sales support.

Company Profile

ThetaMetrisis is a privately held company located in Athens, Greece. The focus of company is to provide integrated state of the art optical metrology tools for the characterization of thin and thick films (film thickness, refractive index and extinction coefficient).

Our tools are cost-affordable without any compromise in accuracy and versatility, thanks to the flexible tool design and parametrized software. Our technology is based on White Light Reflectance Spectroscopy developed at the Institute of Microelectronics, NCSR ‘Demokritos’ offering accurate and simultaneous evaluation of film thickness and refractive index (n, k) of stacked thin and thick films.

ThetaMetrisis also delivers unique analytical services for film characterization such as in-situ film swelling in the presence of controlled vapors, film thickness changes due to thermal cycling, film dissolution etc.

Managment Team

Dr. Dimitris Goustouridis CTO and Founder
He was born in 1969. He received the B.S. from the department of Physics of the University of Patras (1992) and the Ph.D. degree in microelectronics from the Department of Applied Sciences of National Technical University of Athens (2002) for his work on capacitive type pressure sensors. From 2003 until 2007 he was working as lecturer at the Elec. Eng. Dept. TEI of Piraeus and as Post Doc at the NCSR “Demokritos”. He is currently with the Institute of Microelectronics at NCSR “Demokritos” as research associate. His interests include silicon micromachining, MEMS, and development of automated characterization and measurements stations. The period 2000 to 2003 he was actively involved in the commercialization of micromachined capacitive pressure through the Institute of Microelectronics at NCSR “Demokritos”. He has published two patents and more than 40 journal articles on microsystems, thin films, and gas sensor technology. In Theta Metrisis he is responsible for the design and development of the optical metrology tools.

Dr. Ioannis Raptis COO and founder
He received his BS degree in Physics (1989) and his Ph.D. in the field of e-beam lithography (1996) from the National University of Athens. The year 1994 he worked at IESS-CNR (Rome) on the development of very high resolution patterning technologies. From 1997 until 2003 he was working as lecturer at the Elec. Eng. Dept. TEI of Athens and as research associate at the NCSR “Demokritos”. From 2003 he works at the IMEL of NCSR “Demokritos” as researcher and from 2006 as senior researcher. His current research activities are focused on the design and implementation of materials, technologies and novel devices in the micro/nano scale. Currently he is working on the development of optical and electrical based sensing principles. He is/was Key Researcher and Scientific Responsible for several national and international projects. He is author of more than 90 publications in refereed international journals and holder of two patents. In Theta Metrisis he is responsible for the software development and for the marketing of the products.