ThetaMetrisis is a privately held company located in Athens, Greece. The focus of company is to provide integrated state of the art optical metrology tools for the characterization of thin and thick films (film thickness, refractive index and extinction coefficient).
Our tools are cost-affordable without any compromise in accuracy and versatility, thanks to the flexible tool design and parametrized software. Our technology is based on White Light Reflectance Spectroscopy developed at the Institute of Microelectronics, NCSR ‘Demokritos’ offering accurate and simultaneous evaluation of film thickness and refractive index (n, k) of stacked thin and thick films.
ThetaMetrisis also delivers unique analytical services for film characterization such as in-situ film swelling in the presence of controlled vapors, film thickness changes due to thermal cycling, film dissolution etc. |