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Customer tailored tools with unparalleled accuracy, quality & after sales support

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FR-pOrtable

Accurate Characterization of Coatings for Point-of-Need applications

  • USB powered, no-power cable is required
  • Really portable, the probe comes over the sample
  • Suitable for in field apps
  • Thickness measurement down to 20nm
  • Long term operation (2Y guarantee)

any many other unique features ...

FR-pOrtable

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FR-Basic

A Build To Order tool to meet any coating characterization needs

    • Thickness range 5nm-500um
    • Reflectance & Transmittance mesurements
    • Characterization under temperature & ambient controlled environment
    • Characterization of films in liquid (e.g. resist dissolution)

any many other unique characteristics ...

FR-BasicFR-Basic

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FR-Scanner

Automated, Ultra-fast & Accurate mapping of thickness and optical properties of films

  • R-Θ stage with 2um & 0.1o accuracy
  • Simultaneous characterization of multiple layers
  • 625 measurements on 8inch wafer in <60sec
  • Thickness measurement down to 20nm
  • Long-term operation (Light source life >10000h)

any many other unique features ...

FR-Scanner

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Software
& Accessories

FR-Monitor: GUI softare for easy & fast characterization of coatings

(thickness, refractive index, colour, uniformity ...)
in static and dynamic modes.

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FR-Monitor

A wide range of unique accessories e.g.

Integration Sphere Cuvette Holder
Hot plate Trasnmittance module
Gas chamber Pressure chamber
Microfludic cell Vessel for liquids

Software & Accessories

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